Formation of Silicon-on-Insulator Films from Powders

MRS Proceedings 1991 / 1 Vol. 234

Formation of Silicon-on-Insulator Films from Powders

Gadepally, Kamesh V., Hawk, Roger M., Brown, William D.
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Volume:
234
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-234-213
Date:
January, 1991
File:
PDF, 1.06 MB
english, 1991
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