Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material
Lee, J. D., Park, J. C., Krause, S. J., Roitman, P., El-Ghor, M. K.Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-133
Date:
January, 1991
File:
PDF, 4.36 MB
english, 1991