Evolution of Buried Oxide “Pipe” Defects Upon Implantation...

Evolution of Buried Oxide “Pipe” Defects Upon Implantation Through Particles in Simox Material

El-Ghor, M. K., Joyner, K. A., Hosack, H. H.
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Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-153
Date:
January, 1991
File:
PDF, 4.37 MB
english, 1991
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