“Equilibrium Oxide” Features of the SIMOX Process

MRS Proceedings 1991 / 1 Vol. 235

“Equilibrium Oxide” Features of the SIMOX Process

Hosack, H. H., Hollingsworth, J., El-Ghor, M. K., Joyner, K. A.
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Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-159
Date:
January, 1991
File:
PDF, 993 KB
english, 1991
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