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Oxidation Effects During the Formation of Buried Sb Dopant Profiles in Silicon Using Pulsed Laser Epitaxy
Carolissen, Randall J., Pretorius, R.Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-191
Date:
January, 1991
File:
PDF, 439 KB
english, 1991