The Detailed Variation of Boron and Fluorine Profiles with...

MRS Proceedings 1991 / 1 Vol. 235

The Detailed Variation of Boron and Fluorine Profiles with Tilt and Rotation Angles for BF2+ ION Implantation in (100) Silicon

Gupta, Puneet, Park, Changhae, Klein, Kevin, Yang, Shyh-horng, Morris, Steve, Do, Vu, Tasch, Al, Simonton, Robert, Lux, Gayle
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Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-203
Date:
January, 1991
File:
PDF, 465 KB
english, 1991
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