Mesotaxy Layers of IrSi3 in (111)Si Formed by MeV ION...

MRS Proceedings 1991 / 1 Vol. 235

Mesotaxy Layers of IrSi3 in (111)Si Formed by MeV ION Implantation

Short, K. T., White, Alice E., Eaglesham, D. J., Jacobson, D. C., Poate, J. M.

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Volume:

235

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-235-279

Date:

January, 1991

File:

PDF, 1.34 MB

english, 1991

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