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Collisional Energy Deposition Threshold for Extended Damage Depths in Ion-Implanted Silicates
Arnold, G. W., Battaglin, G., Boscolo-Boscoletto, A., Caccavalle, F., De Marchi, G., Mazzoldi, P.Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-407
Date:
January, 1991
File:
PDF, 310 KB
english, 1991