A New Method for Measuring Ion Implantation Amorphous Dose In Situ
Yuan, Jianzhong, Verner, Igor V., Corbett, James W.Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-45
Date:
January, 1991
File:
PDF, 399 KB
english, 1991