Copper-Carbon Alloy Films by Methane Beam Assisted...

MRS Proceedings 1991 / 1 Vol. 235

Copper-Carbon Alloy Films by Methane Beam Assisted Epitaxial Copper Deposition

BROWN, David W., Donovan, Edward P., Cotell, Catherine M., Grabowski, Kenneth S.
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Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-729
Date:
January, 1991
File:
PDF, 1.05 MB
english, 1991
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