Influence of Energy Deposited by Energetic Particle Bombardment on Thin Film Characteristics
Winters, Harold F., Eckstein, W., Coufal, H. J.Volume:
235
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-235-735
Date:
January, 1991
File:
PDF, 516 KB
english, 1991