Selective-Area Growth of Metal Oxide Films Induced by...

Selective-Area Growth of Metal Oxide Films Induced by Patterned Excimer Laser Surface Photolysis

Kunz, R. R., Ehrlich, D. J., Melngailis, J., Horn, M. W.
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Volume:
236
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-236-105
Date:
January, 1991
File:
PDF, 1.72 MB
english, 1991
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