Epitaxy and Chemical Reactions During Thin Film Formation from Low Energy Ions New Kinetic Pathways, New Phases and New Properties
Herbots, Nicole, Hellman, O.C., Vancauwenberghe, O.Volume:
236
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-236-287
Date:
January, 1991
File:
PDF, 3.34 MB
english, 1991