Effect of an Interfacial Ti Layer on the Formation of CoSi2 on Si
Barmak, K., Clevenger, L. A., Agnello, P. D., Ganin, E., Copel, M., Dehaven, P., Falta, J., d'Hcurle, F. M., Cabrai, C.Volume:
238
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-238-575
Date:
January, 1991
File:
PDF, 3.24 MB
english, 1991