The Effect of Hydrogenated Amorphous Silicon on the...

MRS Proceedings 1991 / 1 Vol. 238

The Effect of Hydrogenated Amorphous Silicon on the Formation Rate Kinetics and Crystallography of Palladium Slicide Films

Manning, N. R., Chen, Haydn, Abelson, J. R., Allen, L. H.
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Volume:
238
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-238-617
Date:
January, 1991
File:
PDF, 357 KB
english, 1991
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