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Measurement of Residual Stress-Induced Bending Moment of P+ Silicon Films
Chu, W. H., Mehregany, M., Ning, X., Pirouz, P.Volume:
239
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-239-169
Date:
January, 1991
File:
PDF, 913 KB
english, 1991