![](/img/cover-not-exists.png)
Stress and Microstructure in Rf-Diode and Dc-Magnetron Sputtered Beryllium Thin Films
Mutikainen, Risto H.Volume:
239
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-239-45
Date:
January, 1991
File:
PDF, 1.26 MB
english, 1991