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Investigation of Gaas Deep Etching by Using Reactive Ion Etching Technique
Din, Kuen-Sane, Chi, Gou-ChungVolume:
240
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-240-367
Date:
January, 1991
File:
PDF, 2.43 MB
english, 1991