The Role of the Lead Zirconate Titanate (PZT)-Pt Interface...

MRS Proceedings 1991 / 1 Vol. 243

The Role of the Lead Zirconate Titanate (PZT)-Pt Interface in the Anomalous Phase Transformation Kinetics in Sputtered Pzt Thin Film Capacitors at Sub-2000 Å Thicknesses

Chikarmane, Vinay, Kim, Jiyoung, Sudhama, C., Lee, Jack, Tasch, Al, Novak, Steve
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Volume:
243
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-243-367
Date:
January, 1991
File:
PDF, 895 KB
english, 1991
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