Kinetic Modelling of the Deposition of SiC from Methyltrichlorosilane
Sotirchos, Stratis V., Papasouliotis, George D.Volume:
250
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-250-35
Date:
January, 1991
File:
PDF, 514 KB
english, 1991