The Effect of Contact Overlap Distance on a-Si Tft...

MRS Proceedings 1992 / 1 Vol. 258

The Effect of Contact Overlap Distance on a-Si Tft Performance

Uchikoga, Shuichi, Akiyama, Masahiko, Koizumi, Takashi, Ikeda, Mitsushi, Suzuki, Kouji
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Volume:
258
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-258-1025
Date:
January, 1992
File:
PDF, 319 KB
english, 1992
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