A Particular Photo-CVD Apparatus for Hydrogenated Amorphous Silicon Deposition
Manfredotti, C., Fizzotti, F., Osenga, C., Boero, M., Rigato, V., Quaranta, A.Volume:
258
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-258-165
Date:
January, 1992
File:
PDF, 368 KB
english, 1992