Modification of a-Si(:H) by Thermally Generated Atomic Hydrogen: A Real Time Spectroscopic Ellipsometry Study of Si Bond Breaking
An, Ilsin, Li, Youming, Wronski, C.R., Collins, R.W.Volume:
258
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-258-27
Date:
January, 1992
File:
PDF, 500 KB
english, 1992