Vapor HF Etching for Low Temperature Silicon Epitaxy

MRS Proceedings 1992 / 1 Vol. 259

Vapor HF Etching for Low Temperature Silicon Epitaxy

D'Emic, Christopher P., Blum, Joseph M., Cohen, Susan L., Baseman, Robert J., Gilbert, Monica, Cardone, Frank, Stanis, Carol, Rothman, Laura, Hill, Michael, Krusell, Wilbur
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Volume:
259
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-259-479
Date:
January, 1992
File:
PDF, 1.68 MB
english, 1992
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