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Vapor HF Etching for Low Temperature Silicon Epitaxy
D'Emic, Christopher P., Blum, Joseph M., Cohen, Susan L., Baseman, Robert J., Gilbert, Monica, Cardone, Frank, Stanis, Carol, Rothman, Laura, Hill, Michael, Krusell, WilburVolume:
259
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-259-479
Date:
January, 1992
File:
PDF, 1.68 MB
english, 1992