Characteristics of Polycrystalline Copper Films Made by CVD...

MRS Proceedings 1992 / 1 Vol. 260

Characteristics of Polycrystalline Copper Films Made by CVD from Cu(HFA)2

Kim, Do-Heyoung, Wentorf, Robert H., Gill, William N.
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Volume:
260
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-260-107
Date:
January, 1992
File:
PDF, 3.09 MB
english, 1992
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