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Estimating Local Deposition Conditions and Kinetic Parameters Using Film Profiles
Cale, T. S., Chaara, M. B., Hasper, A.Volume:
260
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-260-393
Date:
January, 1992
File:
PDF, 1.00 MB
english, 1992