Stability of Nanoscale Cobalt Silicide Film Formation on...

MRS Proceedings 1992 / 1 Vol. 260

Stability of Nanoscale Cobalt Silicide Film Formation on Polysilicon

Pramanick, S., Erokhin, Yu. N., Patnaik, B. K., Rozgonyi, G. A., Gambino, J. P.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
260
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-260-435
Date:
January, 1992
File:
PDF, 1.89 MB
english, 1992
Conversion to is in progress
Conversion to is failed