Effects of Lamp Pulses on the Oxygen - Precipitation - Gettering of Cr in Czochralski Grown Si
Chabane-Sari, N-E., Krieger-Kaddour, S., Vinante, C., Barbier, D.Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-1011
Date:
January, 1992
File:
PDF, 2.02 MB
english, 1992