H States, Impurity Passivation and Gettering Studies in...

MRS Proceedings 1992 / 1 Vol. 262

H States, Impurity Passivation and Gettering Studies in H-Implanted Si Crystals

Mukashev, Bulat N., Tokmoldin, Serikbol Zh.
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Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-1017
Date:
January, 1992
File:
PDF, 365 KB
english, 1992
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