![](/img/cover-not-exists.png)
H States, Impurity Passivation and Gettering Studies in H-Implanted Si Crystals
Mukashev, Bulat N., Tokmoldin, Serikbol Zh.Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-1017
Date:
January, 1992
File:
PDF, 365 KB
english, 1992