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Dry Etching of Indium Phosphide
Bond, P., Sengupta, P., Orrman-Rossiter, Kevin G., Reeves, G. K., Paterson, P. J. K.Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-1073
Date:
January, 1992
File:
PDF, 838 KB
english, 1992