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Evaluation of Vacancy-Type Defects in Simox Substrates by a Slow Positron Beam and a Pulsed Positron Beam
Kametani, H., Akiyama, H., Yamaguchi, Y., Koumaru, M., Wei, L., Tabuki, Y., Tanigawa, S., Uedono, A., Watauchi, S., Ujihira, Y., Suzuki, R., Ohgaki, H., Mikado, T.Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-235
Date:
January, 1992
File:
PDF, 1.17 MB
english, 1992