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Monoenergetic Positron Beam Studies of Oxygen in Single Crystal Silicon - Stress Induced Clustering of Oxygen Atoms in Silicon
Nagai, R., Takeda, E., Tabuki, Y., Wei, L., Tanigawa, S.Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-283
Date:
January, 1992
File:
PDF, 483 KB
english, 1992