Characterization of Metal-Oxide-Silicon Interface by...

Characterization of Metal-Oxide-Silicon Interface by Monoenergetic Positron Beam

Ohji, Yuzuru, Uedono, Akira, Wei, Long, Tabuki, Yasushi, Tanigawa, Shoichiro
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Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-313
Date:
January, 1992
File:
PDF, 417 KB
english, 1992
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