Hardness and Modulus Studies on Dielectric Thin Films

MRS Proceedings 1992 / 1 Vol. 265

Hardness and Modulus Studies on Dielectric Thin Films

Chiang, Chien, Neubauer, Gabi, Mack, Anne Sauter, Yoshioka, Ken, Cuan, George, Flinn, Paul A., Fraser, David B.
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Volume:
265
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-265-219
Date:
January, 1992
File:
PDF, 1.95 MB
english, 1992
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