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Oxide Degradation Effects in Dry Patterning of Resist Using Neutral Oxygen Beams
Mlynko, Walter E., Kasi, Srinandan R., Manos, Dennis M.Volume:
268
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-268-41
Date:
January, 1992
File:
PDF, 1.97 MB
english, 1992