Detailed Model of the Afterglow Region of a Microwave...

MRS Proceedings 1992 / 1 Vol. 268

Detailed Model of the Afterglow Region of a Microwave Generated Oxygen Plasma

Chou, Chin-Hao, Wei, Ta-Chin, Phillips, Jonathan
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Volume:
268
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-268-49
Date:
January, 1992
File:
PDF, 277 KB
english, 1992
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