Recoil Implantation of Ito thin Films on Glass Substrates
Rabin, B. H., Harbison, B. B., Shatynski, S. R.Volume:
27
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-27-765
Date:
January, 1983
File:
PDF, 1004 KB
english, 1983