Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators
Johnson, A. David, Busch, J. D., Ray, Curtis A., Sloan, CharlesVolume:
276
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-276-151
Date:
January, 1992
File:
PDF, 3.51 MB
english, 1992