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A Silicon-Based Shape Memory Alloy Microvalve
Ray, Curtis A., Sloan, Charles L., Johnson, A. David, Busch, John D., Petty, Bruce R.Volume:
276
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-276-161
Date:
January, 1992
File:
PDF, 3.04 MB
english, 1992