A Model to Explain the Variations of “End-of-Range” Defect...

MRS Proceedings 1992 / 1 Vol. 279

A Model to Explain the Variations of “End-of-Range” Defect Densities with Ion Implantation Parameters

Laanab, L., Bergaud, C., Faye, M. M., Faure, J., Martinez, A., Claverie, A.

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Volume:

279

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-279-381

Date:

January, 1992

File:

PDF, 1.25 MB

english, 1992

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