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A Model to Explain the Variations of “End-of-Range” Defect Densities with Ion Implantation Parameters
Laanab, L., Bergaud, C., Faye, M. M., Faure, J., Martinez, A., Claverie, A.Volume:
279
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-279-381
Date:
January, 1992
File:
PDF, 1.25 MB
english, 1992