Reaction Kinetics of Atomic chlorine on Si(100)2×1

MRS Proceedings 1992 / 1 Vol. 280

Reaction Kinetics of Atomic chlorine on Si(100)2×1

Karahashi, Kazuhiro, Matsuo, Jiro, Horiuchi, Kei
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Volume:
280
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-280-189
Date:
January, 1992
File:
PDF, 520 KB
english, 1992
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