Production of GexSi1−x, and SiC Films on Si Substrates...

MRS Proceedings 1992 / 1 Vol. 281

Production of GexSi1−x, and SiC Films on Si Substrates Using Particle-Beam Technologies

Kagadey, V. A., Ladizhensky, O. B., Lebedeva, N. I., Matin, E. N., Proskurovsky, D. I., Yakovleva, L. V., Zaporozhchenko, V. I.
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Volume:
281
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-281-491
Date:
January, 1992
File:
PDF, 1.09 MB
english, 1992
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