Repair of Flat Panel Display Substrates by Laser Direct Writing of Metallic Platinum, Copper and Aluminum and Insulating Aluminum Oxide Utilizing Gas Phase Reactants
David Casey, J., Comunale, Richard A.Volume:
282
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-282-197
Date:
January, 1992
File:
PDF, 237 KB
english, 1992