Repair of Flat Panel Display Substrates by Laser Direct...

Repair of Flat Panel Display Substrates by Laser Direct Writing of Metallic Platinum, Copper and Aluminum and Insulating Aluminum Oxide Utilizing Gas Phase Reactants

David Casey, J., Comunale, Richard A.
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Volume:
282
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-282-197
Date:
January, 1992
File:
PDF, 237 KB
english, 1992
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