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Alternate Titanium Source Compounds for CVD of Ti/TiC Coatings
Groshens, Thomas J., Lowe-Ma, Charlotte K., Scheri, Richard C., Dalbey, Robert Z.Volume:
282
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-282-299
Date:
January, 1992
File:
PDF, 378 KB
english, 1992