Low Temperature Selective Area Chemical Vapor Deposition of...

MRS Proceedings 1992 / 1 Vol. 282

Low Temperature Selective Area Chemical Vapor Deposition of Gold Films: Growth and Characterization

Seidler, Paul F., Kowalczyk, Steven P., Holl, Mark M. Banaszak, Yurkas, John J., Norcott, Maurice H., Read, F.
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Volume:
282
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-282-359
Date:
January, 1992
File:
PDF, 826 KB
english, 1992
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