Surface Decomposition Kinetics of Organosilane Precursors...

MRS Proceedings 1992 / 1 Vol. 282

Surface Decomposition Kinetics of Organosilane Precursors to Silicon Carbide

Han, Bin, Hudson, John B., Interrante, Leonard V.
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Volume:
282
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-282-457
Date:
January, 1992
File:
PDF, 454 KB
english, 1992
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