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Structure and Morphology of μic-SiC:H films Produced by PECVD
Demiehelis, F., Crovini, G., Pirri, C. F., Tresso, E., Battezzati, L., Rava, P.Volume:
283
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-283-543
Date:
January, 1992
File:
PDF, 1.07 MB
english, 1992