Large-Grain Doped Poly-Si Films Fabricated Using New...

MRS Proceedings 1992 / 1 Vol. 283

Large-Grain Doped Poly-Si Films Fabricated Using New Excimer Laser Annealing Technique

Iwata, Hiroshi, Nohda, Tomoyuki, Ishida, Satoshi, Kuwahara, Takashi, Sano, Keiichi, Kuriyama, Hiroyuki, Noguchi, Shigeru, Hanafusa, Hiroshi, Kiyama, Keiichi, Tsuda, Shinya, Nakano, Shoichi, Kuwano, Yu
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Volume:
283
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-283-709
Date:
January, 1992
File:
PDF, 1.73 MB
english, 1992
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