A New Annealing Method to Obtain High Quality Poly-Si

MRS Proceedings 1992 / 1 Vol. 283

A New Annealing Method to Obtain High Quality Poly-Si

Song, Yoon-Ho, Baek, Jong-Tae, Nam, Kee-Soo, Kang, Sang-Won
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Volume:
283
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-283-745
Date:
January, 1992
File:
PDF, 1.89 MB
english, 1992
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