Interaction of Atonic Hydrogen with Ion Bombardment Induced...

MRS Proceedings 1992 / 1 Vol. 284

Interaction of Atonic Hydrogen with Ion Bombardment Induced Defects at Si/SiO2 Interfaces

Kar, S., Ashok, S.
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Volume:
284
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-284-281
Date:
January, 1992
File:
PDF, 329 KB
english, 1992
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